A multiscale simulation approach for the MOCVD of GaN using a single-molecule precursor in a vertical stagnation flow reactor

Article

Abstract: A multiscale simulation approach, including atomistic quantum mechanical calculations on the molecul

Palabras claves:

Computational Fluid Dynamics, density functional theory, Gallium azide, Multiscale simulation, Single-molecule precursors

Autores:

Brenner G., Fischer R.A., Khanderi J., Mukinovic M., Schmid R., Spöllmann S., Tafipolsky M., Thomas Cadenbach

Fuentes:

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