Palabras claves: Communications, Integrated circuit, MEMs, Microspectrometers, Optoelectronic, Silicon bulk
Autores: Berman-Mendoza A., Garcia-Delgado L.A., Gomez-Fuentes R., Ignacio Enrique Zaldívar-Huerta, Leal-Cruz A.L., Rojas-Herńandez A.G., Vera-Marquina A.