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Subtipo de publicación
Conference Object(2)
Publisher
Materials Research Society Symposium - Proceedings(1)
Proceedings of the 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics(1)
Área de conocimiento
Ciencia de materiales(2)
Origen
scopus(2)
Determination of elastic properties of MEMS materials using inverse solutions
Conference ObjectAbstract: The inverse solution of the problem of a hole in a plate was employed together with nanoscale deformPalabras claves:Autores:Chasiotis I., Cho S., Jaime F. Cardenas-GarciaFuentes:scopusThin film material parameters derived from full field nanometric displacement measurements in non-uniform MEMS geometries
Conference ObjectAbstract: MEMS-scale polycrystalline silicon 2 μm thin film specimens fabricated via the Multi User MEMS ProcePalabras claves:Autores:Chasiotis I., Cho S., Jaime F. Cardenas-GarciaFuentes:scopus