Comparative study of Al-doped ZnO films deposited by sol–gel and by sputtering using a sintered target from ZnO nanoparticles synthesized by sol–gel

Article

Abstract: Al-doped zinc oxide (ZnO) films were deposited on glass substrates by radio frequency magnetron sput

Palabras claves:

Electrical resistivity, Sol–gel synthesis, Sputtering, Zinc oxide doped films

Autores:

García-Salinas F., Martin Yañez-Limon, Vázquez-Durán A.

Fuentes:

scopus