Palabras claves: antireflecting coating, excellent passivation, Heterojunction, hot wire CVD, lean process, Refractive index, Silicon carbide, tunnel oxide
Autores: Ding K., Eberst A., Finger F., Isabella O., Kim D.Y., Köhler M., Li S., Paul Procel, Pomaska M., Qiu K., Rau U., Singh A., Smirnov V., Zamchiy A., Zeman M.