Mechanical properties by indentation of aluminium nitride nanometric thin film

Article

Abstract: The mechanical properties of thin film are usually determined by nanoindentation in order to circumv

Palabras claves:

Aluminum nitride, Analytical modeling, Nanoindentation, Thin film

Autores:

Burgi J., Chicot D., Decoopman X., Feugeas J.N., Iost A., Javier García Molleja, Roudet F.

Fuentes:

scopus