Nano- and micro-scale wear of fluorinated carbon films

Article

Abstract: Wear of fluorinated carbon films deposited by plasma assisted chemical vapor deposition has been stu

Palabras claves:

Abrasive wheel test, Amorphous, atomic force microscopy, carbon, Photoelectron spectroscopy, Plasma assisted chemical vapor deposition

Autores:

Freire F.L., Maia da Costa M., Paola A. Ayala, Prioli R.

Fuentes:

scopus