Reactive sputter magnetron reactor for preparation of thin films and simultaneous in situ structural study by X-ray diffraction

Article

Abstract: The purpose of the designed reactor is (i) to obtain polycrystalline and/or amorphous thin films by

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Autores:

Burgi J., Craievich A.F., Feugeas J.N., Javier García Molleja, Kellermann G., Neuenschwander R.

Fuentes:

scopus