Laser nano- And micro-structuring of silicon using a laser-induced plasma for beam conditioning

Article

Abstract: A technique based on the interaction between a laser pulse and a laser-induced plasma is proposed as

Palabras claves:

Laser-induced patterning, Laser-induced plasma, Silicon nanostructuring

Autores:

Gabás M., Palanco S., Ramos-Barrado J.R., Romero R., Salvatore Marino

Fuentes:

scopus