Characterization of fabrication process of micropores on silicon substrate by electrochemical method

Article

Abstract: In the present work, the fabrication process of a set of micropores on crystalline silicon wafers ma

Palabras claves:

Biological sensors, Macropores, silicon, Wet etching

Autores:

Der M., Diéguez M.J., Fernandez T., Golmar F., Granell P., Gustavo Iván Rosero Yañez, Lasorsa C., Lerner B., Olmos C.M., Perez M.S., Sacco F., Santizo I.

Fuentes:

scopus