Germanium metal-semiconductor-metal photodetectors evanescently coupled with upper-level silicon oxynitride dielectric waveguides

Article

Abstract: We demonstrate Ge-on-Si metal-semiconductor-metal (MSM) photodetectors monolithically integrated wit

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Autores:

Ahn D., Banerjee S., Campbell J., Cervantes-González J., Ignacio Enrique Zaldívar-Huerta, Jacome A., Zheng X.

Fuentes:

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