Evaluation of the influence of bias voltage on the corrosion resistance of Al-Nb-N thin films

Article

Abstract: Niobium Nitride (NbN) and Aluminum Niobium Nitride (AlNbN) thin films were deposited on silicon (100

Palabras claves:

Aluminum niobium nitride, CORROSIÓN, Electrochemistry, magnetron sputtering

Autores:

Amaya C., Bejarano G., Caicedo J.C., Moreno H., Nieto J., Tirado L., William Arnulfo Ch Aperador

Fuentes:

scopus