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Proceedings of the 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics(1)
Sensors and Actuators, A: Physical(1)
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Ingeniería y operaciones afines(2)
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scopus(2)
Determination of elastic properties of MEMS materials using inverse solutions
Conference ObjectAbstract: The inverse solution of the problem of a hole in a plate was employed together with nanoscale deformPalabras claves:Autores:Chasiotis I., Cho S., Jaime F. Cardenas-GarciaFuentes:scopusMeasurement of nanodisplacements and elastic properties of MEMS via the microscopic hole method
ArticleAbstract: The objective of this paper is to demonstrate the application of the microscopic hole method as an aPalabras claves:Inverse Problem, material properties, MEMs, Microscopic hole method, Nanometric displacements, Polycrystalline silicon, thin filmsAutores:Chasiotis I., Cho S., Jaime F. Cardenas-GarciaFuentes:scopus