Surface modification of porous silicon-based films using dichlorosilanes dissolved in supercritical carbon dioxide

Article

Abstract: Dimethyldichlorosilane (DMDCS), diethyldichlorosilane (DEDCS), and dibutyldichlorosilane (DBDCS) wer

Palabras claves:

Autores:

Eduardo Vyhmeister, Estévez L.A., Muscat A.J., Suleiman D., Valdes-Gonzalez H.

Fuentes:

scopus