Bi-stable micro actuator based on stress engineered nano-diamond

Article

Abstract: In this work we present a bi-stable diamond micro-bridge with a centre operating contact, which can

Palabras claves:

Actuators, Hot filament CVD, Micro-electro-mechanical systems (MEMS), nanocrystalline

Autores:

Francisco J.López Hernández, Haroon S., Kohn E., Kusterer J., Müller R., Munding A., Schmid P.

Fuentes:

scopus