(1011) preferential orientation of polycrystalline AlN grown on SiO<inf>2</inf>/Si wafers by reactive sputter magnetron technique

Article

Abstract: Aluminum nitride (AlN) is a ceramic compound that could be used as a processing material for semicon

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Autores:

Bemporad E., Bolmaro R., Burgi J., Craievich A.F., Feugeas J.N., Javier García Molleja, Piccoli M.

Fuentes:

scopus