Modeling of very thin aluminum nitride film mechanical properties from nanoindentation measurements

Article

Abstract: The mechanical property determination of thin films by nanoindentation can be affected by the substr

Palabras claves:

Aluminum nitride, Elastic modulus, hardness, Modeling, Nanoindentation, thin films

Autores:

Burgi J., Chicot D., Decoopman X., Feugeas J.N., Iost A., Javier García Molleja, Nosei L., Roudet F.

Fuentes:

scopus