Kinetic analysis of the chemical vapor deposition of si from SiCl <inf>4</inf> - H<inf>2</inf> for the production of biomorphic Si <inf>3</inf>N<inf>4</inf> ceramics

Conference Object

Abstract: Biomorphic porous Si3N4 ceramics derived from paper were produced in a three step process consisting

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Autores:

Daniela Almeida Streitwieser, Ghanem H., Popovska N.

Fuentes:

scopus