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Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiN <inf>x</inf> thin film deposited by magnetron co-sputtering
ArticleAbstract: We investigate the deposition of TiWSiN x thin films by means of the method of reactive magnetron coPalabras claves:Co-sputtering, Mechanical properties, TiWSiN films x, WearAutores:Coy L.E., Macías H.A., Olaya-Flórez J.J., William Arnulfo Ch Aperador, Yate L.Fuentes:scopusInfluence of Si-addition on wear and oxidation resistance of TiWSi<inf>x</inf>N thin films
ArticleAbstract: TiWSixN films were deposited using a magnetron co-sputtering system on silicon (111), 316L stainlessPalabras claves:Co-sputtering, Cyclic oxidation, Sublimation of WO 3, TiWSi N films x, Wear rateAutores:Coy L.E., Macías H.A., Olaya-Flórez J.J., William Arnulfo Ch Aperador, Yate L.Fuentes:scopusInsights and optimization of the structural and mechanical properties of TiWSiN coatings using the Taguchi method
ArticleAbstract: A Taguchi L16(45) orthogonal array design was selected to determine the influence of the depositionPalabras claves:Co-sputtering, CORROSIÓN, Silicon nitride, Taguchi method, TiWSiN thin films, WearAutores:Coy L.E., Macías H.A., Olaya-Flórez J.J., William Arnulfo Ch Aperador, Yate L.Fuentes:scopus