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Mechanical properties by indentation of aluminium nitride nanometric thin film
ArticleAbstract: The mechanical properties of thin film are usually determined by nanoindentation in order to circumvPalabras claves:Aluminum nitride, Analytical modeling, Nanoindentation, Thin filmAutores:Burgi J., Chicot D., Decoopman X., Feugeas J.N., Iost A., Javier García Molleja, Roudet F.Fuentes:scopusModeling of very thin aluminum nitride film mechanical properties from nanoindentation measurements
ArticleAbstract: The mechanical property determination of thin films by nanoindentation can be affected by the substrPalabras claves:Aluminum nitride, Elastic modulus, hardness, Modeling, Nanoindentation, thin filmsAutores:Burgi J., Chicot D., Decoopman X., Feugeas J.N., Iost A., Javier García Molleja, Nosei L., Roudet F.Fuentes:scopus