Optical and compositional properties of amorphous silicon-germanium films by plasma processing for integrated photonics

Article

Abstract: We report the study of hydrogenated amorphous silicongermanium (a-Si1-XGeX:H) films prepared by low-

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Autores:

Hernández-Montero W.W., Ignacio Enrique Zaldívar-Huerta, Itzmoyotl-Toxqui A., Reyes-Betanzo C., Torres-Jácome A., Zúñiga-Islas C.

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scopus