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Determination of multilayer effect evidence on metal carbon-nitride system

Abstract:

TiCN/TiNbCN multilayers were deposited on silicon substrates by r.f. magnetron sputtering with alternatively changing the sputtering plasma composition between pure Ti + C and Nb elements under a reactive mixture Ar/N2. Bilayer period values varied from nanometric range (15 nm) to higher micrometric range (1.5 μm). The coatings structural and stoichiometric properties were analyzed by HAX-ray, X-ray photoelectron spectroscopy (XPS), secondary ion mass spectrometry (SIMS) and cross-sectional transmission electron microscopy (HRTEM). The multilayer period and relative thickness were clearly determined, and a growth structure was found on the TiCN/TiNbCN multilayers. Additionally, an epitaxial relationship was found between layers inside each columnar crystallite, given by (111)[110]TiCN//(111)[110]TiNbCN. The mechanical properties showed an evolution as function of bilayer period increase under cube-on-cube epitaxial growth effect.