Dimensional metrology of nanometric spherical particles using AFM: II, application of model-tapping mode

Abstract:

Colloidal gold particles of 5, 10 and 15 nm diameter were deposited on silicon chips and used to determine the tip radius and the horizontal distortion of images when the atomic force microscope is used in the tapping mode (AFMT). A new calibration routine is proposed and tested that enables assessment of the tip radius and the radius of nanometric spherical features being imaged by AFMT. The calibration routine is based on the geometrical interaction that occurs only with the apex of the tip.

Año de publicación:

1998

Keywords:

• Tip Calibration
• Tapping mode
• Broadening effect
• atomic force microscopy

Fuente:

scopus