Near-Field of Resonating Piezoelectric Membrane Used As Ultrasound Transducer

Abstract:

Micromachined ultrasound transducers have wide range of applications [1]. As a sensor or actuator they can be used for measuring fluid speed and direction, to mix and excite particles (sonication), for taking images (ultrasonography), for non-destructive testing and many other purposes in wide variety of fields. For this particular study, a simplified 3D model of micromachined piezoelectric membrane has been built. It consist of a circular Aluminium Nitride piezoelectric layer in between two Aluminium electrodes and an air or water domain where the pressure field propagates. The model of the transducer uses multi-physics coupling between Acoustics, Solid Mechanics and Electrostatics [2, 3, 4]. In a Stationary Study, the model computes the static displacement of the transducer membrane. Also, the frequency of the first resonance mode is computed by using the Eigenfrequency Study. As the resonant frequency matches with the experimental one, we proceed by using the Frequency Domain to take advantage of the Acoustics module and compute the pressure field produced by the transducer. The final goal is the simulated displacement and pressure field (see Figure 1 and 3) to be compared with the results from the experimental set up for validation.

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