Two-parameter pressure and temperature measuring transducer based on a voltage-controlled MEMS-elements

Abstract:

In this paper the authors propose electrostatic multi-parameter measuring MEMS-transducer with shock excitation of a movable electrode. The multidimensional basis of output signals generated by a two-parameter measuring transducer under conditions of shock excitation of voltage-controlled movable MEMS-electrodes in electrostatic capacitor has been constructed. The peculiar features of a two-parameter sensor for measuring pressure and temperature are considered. Simulation of a two-parameter measuring transducer has been carried out and its calibration characteristics have been obtained.

Año de publicación:

2019

Keywords:

• Two-parameter measuring transducer
• Matrix movable electrode
• Electrostatic control
• MEMS-capacitor

Fuente:

scopus