Composite nanoestructurado del sistema binario W - C en películas obtenidas por pulverización catódica

Abstract:

Thin films of binary system were deposited on an austenitic steel substrate by RF magnetron sputtering process. The films were obtained starting from a W - C binary target prepared by fixation of tungsten (W) portions on a graphite (C) target. Characterization of the films was carried out by Raman spectroscopy, Energy Dispersive X-ray Spectroscopy (EDX), and Atomic Force Microscopy (AFM). Into the films, it was possible to identify a nanostructure composite relating their chemi-cal composition whit phases WC (δ) and W2C (β). The study shows how the chemical composition and the obtention of the WC (δ) and W2C (β) phases depend on the deposition parameters and composition of the targets used.

Año de publicación:

2013

Keywords:

• Sputtering
• Tungsten carbide
• Raman spectroscopy

Fuente:

scopus