Conduction mechanisms and charge trapping control in SiO<inf>2</inf> nanoparticle MIM capacitors

Abstract:

The objective of this paper is to present a charge trapping control method for MIM capacitors in which the dielectric is made of electrospray-deposited silica nanoparticles. The influence of the bias voltage on the impedance spectra of the devices is analyzed, as well as the main conduction mechanisms along the structure. The control method allows to monitor and control the long term drifts in the impedance of these devices, which are a result of the applied bias voltages.

Año de publicación:

2020

Keywords:

• Silica nanospheres
• Sigma-delta control
• ELECTROSPRAY
• Charge control
• MIM capacitors

Fuente:

google

scopus