Documentos de Sánchez E.A. | REDI

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Filtros aplicados

Palabras Claves: "Ion implantation"

Subtipo de publicación

Publisher

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms(1)

Área temáticas

Ingeniería y operaciones afines(1)

Química física(1)

Área de conocimiento

Ciencia de materiales(1)

Año de Publicación

Origen

Palabras Claves

Surface structure, morphology roughness and topography(1)

atomic force microscopy(1)

Topographical characterization of Ar-bombarded Si(1 1 1) surfaces by atomic force microscopy

Abstract: We used atomic force microscopy to study the topographical changes induced on Si(1 1 1) surfaces by

Palabras claves:

atomic force microscopy, Ion implantation, silicon, Surface structure, morphology roughness and topography

Dario Niebieskikwiat, Gayone J.E., Grizzi O., Kaul E., Pregliasco G., Sánchez E.A.