In situ FTIR experimental results in the silylation of low-k films with hexamethyldisilazane dissolved in supercritical carbon dioxide

Article

Abstract: In situ Fourier Transform Infrared Spectroscopy measurements were performed using an innovative equi

Palabras claves:

Heterogeneous reaction, HMDS, In situ FTIR, Low-k, Silylation

Autores:

Eduardo Vyhmeister, Estévez L.A., Muscat A.J., Reyes-Bozo L., Salazar J.L., Suleiman D., Valdes-Gonzalez H.

Fuentes:

scopus