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In-Situ FTIR Kinetic Study in the Silylation of Low-k Films with Hexamethyldisilazane Dissolved in Supercritical CO<inf>2</inf>
ArticleAbstract: In-situ Fourier transform infrared spectroscopy measurements were obtained by using an innovative eqPalabras claves:HMDS, kinetics, Reaction engineering, Semiconductors, Silylation, Supercritical fluidsAutores:Eduardo Vyhmeister, Estévez L.A., Muscat A.J., Reyes-Bozo L., Roman Nicolay Rodríguez-Maecker, Suleiman D., Valdes-Gonzalez H.Fuentes:scopusSimulation and process optimization of a membrane-based dense gas extraction using hollow fiber contactors
ArticleAbstract: Supercritical fluid and membrane technology coupling is a relatively new concept applicable to solvePalabras claves:mass transfer, Membrane contactors, membranes, Modeling, Optimization, Process intensification, Supercritical CO 2Autores:Cubillos F.A., Eduardo Vyhmeister, Estay H., Romero J.Fuentes:scopusStudy of Low-k Film Functionalization and Pore Sealing Using Chlorosilanes Dissolved in Supercritical Carbon Dioxide
ArticleAbstract: Surface functionalization of hydrolyzed methyl-silsesquioxane films were performed by treatment of sPalabras claves:Carbon dioxide, Heterogeneous reaction, Methyltrichlorosilane, Silylation, Supercritical fluid, TrimethylchlorosilaneAutores:Eduardo Vyhmeister, Estévez L.A., Muscat A.J., Reyes-Bozo L., Roman Nicolay Rodríguez-Maecker, Suleiman D.Fuentes:scopus