Two-parameter pressure and temperature measuring transducer based on a voltage-controlled MEMS-elements

Conference Object

Abstract: In this paper the authors propose electrostatic multi-parameter measuring MEMS-transducer with shock

Palabras claves:

Electrostatic control, Matrix movable electrode, MEMS-capacitor, Two-parameter measuring transducer

Autores:

Avalos-González D., Juan Iván Nieto-Hipólito, Pidchenko S., Taranchuk A.

Fuentes:

scopus