Determination of multilayer effect evidence on metal carbon-nitride system

Article

Abstract: TiCN/TiNbCN multilayers were deposited on silicon substrates by r.f. magnetron sputtering with alter

Palabras claves:

Epitaxial growth, Mechanical properties, Multilayers, TiCN, TiNbCN

Autores:

Caicedo J.C., Guerrero A., William Arnulfo Ch Aperador

Fuentes:

scopus