Evolution of physical properties in hafnium carbonitride thin films

Article

Abstract: Hafnium carbonitride coatings were deposited onto silicon substrates by reactive r.f. magnetron co-s

Palabras claves:

HfCN, magnetron sputtering, Mechanical properties, Metal carbon-nitrides

Autores:

Caicedo J.C., Piedrahita W.F., Prieto P., William Arnulfo Ch Aperador

Fuentes:

scopus