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In situ FTIR experimental results in the silylation of low-k films with hexamethyldisilazane dissolved in supercritical carbon dioxide
ArticleAbstract: In situ Fourier Transform Infrared Spectroscopy measurements were performed using an innovative equiPalabras claves:Heterogeneous reaction, HMDS, In situ FTIR, Low-k, SilylationAutores:Eduardo Vyhmeister, Estévez L.A., Muscat A.J., Reyes-Bozo L., Salazar J.L., Suleiman D., Valdes-Gonzalez H.Fuentes:scopusSurface modification of porous silicon-based films using dichlorosilanes dissolved in supercritical carbon dioxide
ArticleAbstract: Dimethyldichlorosilane (DMDCS), diethyldichlorosilane (DEDCS), and dibutyldichlorosilane (DBDCS) werPalabras claves:Autores:Eduardo Vyhmeister, Estévez L.A., Muscat A.J., Suleiman D., Valdes-Gonzalez H.Fuentes:scopus