Dielectric constant measurement using atomic force microscopy of dielectric films: a system theory approach

Article

Abstract: A technique was developed to measure dielectric constant at microscale based on the system theory ap

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Autores:

Arciniega J.J.G., Cruz-Valeriano E., Davila S.M., Enríquez-Flores C.I., Escamilla-Díaz T., Gutiérrez-Peralta A.M., Guzmán-Caballero D.E., Martin Yañez-Limon, Murillo-Bracamontes E.A., Palmerin J.M., Ramírez-Bon R., Torres-Ochoa J.A.

Fuentes:

scopus