Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiN <inf>x</inf> thin film deposited by magnetron co-sputtering

Article

Abstract: We investigate the deposition of TiWSiN x thin films by means of the method of reactive magnetron co

Palabras claves:

Co-sputtering, Mechanical properties, TiWSiN films x, Wear

Autores:

Coy L.E., Macías H.A., Olaya-Flórez J.J., William Arnulfo Ch Aperador, Yate L.

Fuentes:

scopus