Coherent assembly of heterostructures in ternary and quaternary carbonitrides

Article

Abstract: In this study, ternary and quaternary carbonitride heterostructure systems were grown on silicon (10

Palabras claves:

Heterostructure system, magnetron sputtering, Structural evolution

Autores:

Caicedo J.C., Saldarriaga W., William Arnulfo Ch Aperador

Fuentes:

scopus